Pfeiffer Vacuum

IKR gauges cover the pressure range between 1 x 10-2 and 1 x 10-9 mbar. PKR gauges cover the range from atmosphere to 1 x 10-9 mbar. The patented design of the vacuum gauges minimizes stray magnetic fields substantially. This is an important advantage in applications where external magnetic fields would prove disruptive, such as mass spectrometry or electron microscopy. A novel double-chamber design keeps process-related contaminants away from the measurement chamber, while the textured surface of the measurement chamber prevents measuring errors and lapses due to self-sputtering.